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MSE Seminar - Dr. Susan Trolier-McKinstry, Penn State University
Monday, April 25, 2016 - 4:00pm
Dr. Susan Trolier-McKinstry
Professor of Ceramic Science and Engineering and Electrical Engineering, Penn State University
Piezoelectric Films for Microelectromechanical Systems
Monday, April 25th, 2016, 4:00 p.m.
Piezoelectric thin films are of increasing interest in low voltage microelectromechanical systems (MEMS) for sensing, actuation, and energy harvesting. They also serve as model systems to study fundamental behavior in piezoelectrics. The seminar will discuss how materials are optimized for these applications, as well as examples of the use of piezoelectric films over a wide range of length scales. The key figures of merit for actuators and energy harvesting will be discussed, with emphasis on how to achieve these on practical substrates. For example, control of the domain structure of the ferroelectric material allows the energy harvesting figure of merit for the piezoelectric layer to be increased by factors of 4 – 10. Likewise, control of crystallographic orientation and substrate clamping enables large increases in the figure of merit for actuators. To illustrate the functionality of these films, examples of integration into MEMS structures will also be discussed, including adaptive optics for Xray telescopes, low frequency and non-resonant piezoelectric energy harvesting devices, and piezoelectronic transistors as a potential replacement for CMOS electronics.
Bio: Susan Trolier-McKinstry is a professor of ceramic science and engineering at The Pennsylvania State University, where she also serves as the director of the W. M. Keck Smart Materials Integration Laboratory and co-director of the Nanofab. She obtained B.S., M.S. and Ph.D. degrees in Ceramic Science and Engineering, all from Penn State. On graduation she joined the faculty there. She is a fellow of IEEE and the American Ceramic Society, and is an academician of the World Academy of Ceramics. She was also the recipient of National Security Science and Engineering Faculty Fellowship, the IEEE Ferroelectrics Achievement Award, and the Ceramic Education Council Outstanding Educator Award, among others.
Her main research interests include thin films for dielectric and piezoelectric applications. Her group studies the fundamental mechanisms that contribute to the measured properties, processing studies for electroceramic films, and integration of functional materials into microelectromechanical systems. She has co-authored >320 papers in these areas, and has several patents. Twenty former members of her group are now faculty members around the world; others have taken jobs with companies and national laboratories.
She is currently an associate editor for Applied Physics Letters, the Journal of the American Ceramic Society, and the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. She has also served as the President of the Ceramics Education Council and the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society; she recently completed a term on the Board of Directors for the Materials Research Society; she recently completed a term on the Board of Directors for the Materials Research Society.